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In order to comprehend spectroscopic ellipsometry, however, a fundamental knowledge for optics is required. In the book, therefore, "Principles of Optics" and "Polarization of Light" are described (Chapters 2 and 3). From these two chapters, the principles of spectroscopic ellipsometry presented in Chapter 4 can be understood more easily. The author focuses on data analysis in the next few chapters: in particular, the principles and physical backgrounds of ellipsometry analysis are discussed in detail in Chapter 5. Since there is growing interest for optical anisotropy, the data analysis of anisotropic materials is explained in Chapters 6 and the subsequent chapter presents examples of ellipsometry analyses for various materials used in different fields are described. In the final chapter, the applications of spectroscopic ellipsometry for growth monitoring and feedback control of processing are addressed.
This book will be appropriate as a text for students as well as researchers, in institutes and industrial laboratories, in providing practical information on the applications of spectroscopic ellipsometry.
In order to comprehend spectroscopic ellipsometry, however, a fundamental knowledge for optics is required. In the book, therefore, "Principles of Optics" and "Polarization of Light" are described (Chapters 2 and 3). From these two chapters, the principles of spectroscopic ellipsometry presented in Chapter 4 can be understood more easily. The author focuses on data analysis in the next few chapters: in particular, the principles and physical backgrounds of ellipsometry analysis are discussed in detail in Chapter 5. Since there is growing interest for optical anisotropy, the data analysis of anisotropic materials is explained in Chapters 6 and the subsequent chapter presents examples of ellipsometry analyses for various materials used in different fields are described. In the final chapter, the applications of spectroscopic ellipsometry for growth monitoring and feedback control of processing are addressed.
This book will be appropriate as a text for students as well as researchers, in institutes and industrial laboratories, in providing practical information on the applications of spectroscopic ellipsometry.
Preface.
Acknowledgments.
1 Introduction to Spectroscopic Ellipsometry.
1.1 Features of Spectroscopic Ellipsometry.
1.2 Applications of Spectroscopic Ellipsometry.
1.3 Data Analysis.
1.4 History of Development.
1.5 Future Prospects.
References.
2 Principles of Optics.
2.1 Propagation of Light.
2.2 Dielectrics.
2.3 Reflection and Transmission of Light.
2.4 Optical Interference.
References.
3 Polarization of Light.
3.1 Representation of Polarized Light.
3.2 Optical Elements.
3.3 Jones Matrix.
3.4 Stokes Parameters.
References.
4 Principles of Spectroscopic Ellipsometry.
4.1 Principles of Ellipsometry Measurement.
4.2 Ellipsometry Measurement.
4.3 Instrumentation for Ellipsometry.
4.4 Precision and Error of Measurement.
References.
5 Data Analysis.
5.1 Interpretation of (¿, ¿).
5.2 Dielectric Function Models.
5.3 Effective Medium Approximation.
5.4 Optical Models.
5.5 Data Analysis Procedure.
References.
6 Ellipsometry of Anisotropic Materials.
6.1 Reflection and Transmission of Light by Anisotropic Materials.
6.2 Fresnel Equations for Anisotropic Materials.
6.3 4×4 Matrix Method.
6.4 Interpretation of (¿, ¿) for Anisotropic Materials.
6.5 Measurement and Data Analysis of Anisotropic Materials.
References.
7 Data Analysis Examples.
7.1 Insulators.
7.2 Semiconductors.
7.3 Metals/Semiconductors.
7.4 Organic Materials/Biomaterials.
7.5 Anisotropic Materials.
References.
8 Real-Time Monitoring by Spectroscopic Ellipsometry.
8.1 Data Analysis in Real-Time Monitoring.
8.2 Observation of Thin-Film Growth by Real-Time Monitoring.
8.3 Process Control by Real-Time Monitoring.
References.
Appendices.
1 Trigonometric Functions.
2 Definitions of Optical Constants.
3 Maxwell's Equations for Conductors.
4 Jones-Mueller Matrix Conversion.
5 Kramers-Kronig Relations.
Index.
| Erscheinungsjahr: | 2007 |
|---|---|
| Genre: | Chemie, Importe |
| Rubrik: | Naturwissenschaften & Technik |
| Medium: | Buch |
| Inhalt: | Gebunden |
| ISBN-13: | 9780470016084 |
| ISBN-10: | 0470016086 |
| Sprache: | Englisch |
| Einband: | Gebunden |
| Autor: | Fujiwara, Hiroyuki |
| Hersteller: | Wiley |
| Verantwortliche Person für die EU: | Libri GmbH, Europaallee 1, D-36244 Bad Hersfeld, gpsr@libri.de |
| Maße: | 235 x 157 x 28 mm |
| Von/Mit: | Hiroyuki Fujiwara |
| Erscheinungsdatum: | 12.03.2007 |
| Gewicht: | 0,787 kg |
Preface.
Acknowledgments.
1 Introduction to Spectroscopic Ellipsometry.
1.1 Features of Spectroscopic Ellipsometry.
1.2 Applications of Spectroscopic Ellipsometry.
1.3 Data Analysis.
1.4 History of Development.
1.5 Future Prospects.
References.
2 Principles of Optics.
2.1 Propagation of Light.
2.2 Dielectrics.
2.3 Reflection and Transmission of Light.
2.4 Optical Interference.
References.
3 Polarization of Light.
3.1 Representation of Polarized Light.
3.2 Optical Elements.
3.3 Jones Matrix.
3.4 Stokes Parameters.
References.
4 Principles of Spectroscopic Ellipsometry.
4.1 Principles of Ellipsometry Measurement.
4.2 Ellipsometry Measurement.
4.3 Instrumentation for Ellipsometry.
4.4 Precision and Error of Measurement.
References.
5 Data Analysis.
5.1 Interpretation of (¿, ¿).
5.2 Dielectric Function Models.
5.3 Effective Medium Approximation.
5.4 Optical Models.
5.5 Data Analysis Procedure.
References.
6 Ellipsometry of Anisotropic Materials.
6.1 Reflection and Transmission of Light by Anisotropic Materials.
6.2 Fresnel Equations for Anisotropic Materials.
6.3 4×4 Matrix Method.
6.4 Interpretation of (¿, ¿) for Anisotropic Materials.
6.5 Measurement and Data Analysis of Anisotropic Materials.
References.
7 Data Analysis Examples.
7.1 Insulators.
7.2 Semiconductors.
7.3 Metals/Semiconductors.
7.4 Organic Materials/Biomaterials.
7.5 Anisotropic Materials.
References.
8 Real-Time Monitoring by Spectroscopic Ellipsometry.
8.1 Data Analysis in Real-Time Monitoring.
8.2 Observation of Thin-Film Growth by Real-Time Monitoring.
8.3 Process Control by Real-Time Monitoring.
References.
Appendices.
1 Trigonometric Functions.
2 Definitions of Optical Constants.
3 Maxwell's Equations for Conductors.
4 Jones-Mueller Matrix Conversion.
5 Kramers-Kronig Relations.
Index.
| Erscheinungsjahr: | 2007 |
|---|---|
| Genre: | Chemie, Importe |
| Rubrik: | Naturwissenschaften & Technik |
| Medium: | Buch |
| Inhalt: | Gebunden |
| ISBN-13: | 9780470016084 |
| ISBN-10: | 0470016086 |
| Sprache: | Englisch |
| Einband: | Gebunden |
| Autor: | Fujiwara, Hiroyuki |
| Hersteller: | Wiley |
| Verantwortliche Person für die EU: | Libri GmbH, Europaallee 1, D-36244 Bad Hersfeld, gpsr@libri.de |
| Maße: | 235 x 157 x 28 mm |
| Von/Mit: | Hiroyuki Fujiwara |
| Erscheinungsdatum: | 12.03.2007 |
| Gewicht: | 0,787 kg |
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