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Chapter 1: Overview of MEMS and Microsystems.
Problems.
Chapter 2: Working Principles of Microsystems.
Problems.
Chapter 3: Engineering Science for Microsystems Design and Fabrication.
Problems.
Chapter 4: Engineering Mechanics for Microsystems Design.
Problems.
Chapter 5: Thermofluid Engineering and Microsystems Design.
Problems.
Chapter 6: Scaling Laws in Miniaturization.
Problems.
Chapter 7: Materials for MEMS and Microsystems.
Problems.
Chapter 8: Microsystems Fabrication Processes.
Problems.
Chapter 9: Overview of Micromanufacturing.
Problems.
Chapter 10: Microsystem Design.
Problems.
Chapter 11: Assembly, Packaging and Testing of Microsystems.
Problems.
Chapter 12: Introduction to Nanoscale Engineering.
Problems.
Bibliography.
Index.
| Erscheinungsjahr: | 2008 |
|---|---|
| Fachbereich: | Nachrichtentechnik |
| Genre: | Technik |
| Rubrik: | Naturwissenschaften & Technik |
| Medium: | Buch |
| Seiten: | 576 |
| Inhalt: | 576 S. |
| ISBN-13: | 9780470083017 |
| ISBN-10: | 0470083018 |
| Sprache: | Englisch |
| Einband: | Gebunden |
| Autor: | Hsu, Tai-Ran |
| Auflage: | 2nd edition |
| Hersteller: |
Wiley
John Wiley & Sons |
| Maße: | 241 x 196 x 35 mm |
| Von/Mit: | Tai-Ran Hsu |
| Erscheinungsdatum: | 01.03.2008 |
| Gewicht: | 1,261 kg |
Chapter 1: Overview of MEMS and Microsystems.
Problems.
Chapter 2: Working Principles of Microsystems.
Problems.
Chapter 3: Engineering Science for Microsystems Design and Fabrication.
Problems.
Chapter 4: Engineering Mechanics for Microsystems Design.
Problems.
Chapter 5: Thermofluid Engineering and Microsystems Design.
Problems.
Chapter 6: Scaling Laws in Miniaturization.
Problems.
Chapter 7: Materials for MEMS and Microsystems.
Problems.
Chapter 8: Microsystems Fabrication Processes.
Problems.
Chapter 9: Overview of Micromanufacturing.
Problems.
Chapter 10: Microsystem Design.
Problems.
Chapter 11: Assembly, Packaging and Testing of Microsystems.
Problems.
Chapter 12: Introduction to Nanoscale Engineering.
Problems.
Bibliography.
Index.
| Erscheinungsjahr: | 2008 |
|---|---|
| Fachbereich: | Nachrichtentechnik |
| Genre: | Technik |
| Rubrik: | Naturwissenschaften & Technik |
| Medium: | Buch |
| Seiten: | 576 |
| Inhalt: | 576 S. |
| ISBN-13: | 9780470083017 |
| ISBN-10: | 0470083018 |
| Sprache: | Englisch |
| Einband: | Gebunden |
| Autor: | Hsu, Tai-Ran |
| Auflage: | 2nd edition |
| Hersteller: |
Wiley
John Wiley & Sons |
| Maße: | 241 x 196 x 35 mm |
| Von/Mit: | Tai-Ran Hsu |
| Erscheinungsdatum: | 01.03.2008 |
| Gewicht: | 1,261 kg |
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