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Cover: 9780128124543 | High Power Impulse Magnetron Sputtering | Daniel Lundin (u. a.) | Buch
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High Power Impulse Magnetron Sputtering
Fundamentals, Technologies, Challenges and Applications
Taschenbuch von Daniel Lundin (u. a.)
Sprache: Englisch

164,95 €*

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Lieferzeit 4-7 Werktage

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Beschreibung
High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes.

Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution.

High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes.

Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution.

Inhaltsverzeichnis
1. Introduction (particle surface interaction) 2. Power coupling 3. HiPIMS process characteristics 4. Reactive HiPIMS 5. HiPIMS modeling 6. Physics of HiPIMS 7. HiPIMS thin films 8. Industrialization of HiPIMS
Details
Genre: Technik
Rubrik: Naturwissenschaften & Technik
Medium: Taschenbuch
ISBN-13: 9780128124543
ISBN-10: 0128124547
Sprache: Englisch
Herstellernummer: C2016-0-02463-4
Redaktion: Lundin, Daniel
Minea, Tiberiu
Gudmundsson, Jon Tomas
Hersteller: Elsevier
Elsevier Science & Technology
Maße: 18 x 152 x 229 mm
Von/Mit: Daniel Lundin (u. a.)
Gewicht: 0,63 kg
preigu-id: 126702370
Inhaltsverzeichnis
1. Introduction (particle surface interaction) 2. Power coupling 3. HiPIMS process characteristics 4. Reactive HiPIMS 5. HiPIMS modeling 6. Physics of HiPIMS 7. HiPIMS thin films 8. Industrialization of HiPIMS
Details
Genre: Technik
Rubrik: Naturwissenschaften & Technik
Medium: Taschenbuch
ISBN-13: 9780128124543
ISBN-10: 0128124547
Sprache: Englisch
Herstellernummer: C2016-0-02463-4
Redaktion: Lundin, Daniel
Minea, Tiberiu
Gudmundsson, Jon Tomas
Hersteller: Elsevier
Elsevier Science & Technology
Maße: 18 x 152 x 229 mm
Von/Mit: Daniel Lundin (u. a.)
Gewicht: 0,63 kg
preigu-id: 126702370
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