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Electrical Atomic Force Microscopy for Nanoelectronics
Buch von Umberto Celano
Sprache: Englisch

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Beschreibung
The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changedby the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changedby the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Über den Autor

Umberto Celano is a senior research scientist at imec (Belgium), where his interests encompass solid-state physics and materials science for application in nanoelectronics and emerging devices. In this area, he conducted research at the border between engineering and fundamental science in various institutions such as KU Leuven, Osaka University, and Stanford University. He received his Ph.D. in Physics from the University of Leuven in 2015. Previously, Umberto obtained a B.Eng. in Electronic Engineering and an M.Sc. degree in Nanoelectronics from the University of Rome Sapienza, Italy.

Zusammenfassung

Comprehensive treatment of emerging devices, their operation and characterization

Authors provide a balance of industry and academic expertise

Includes images of state-of-the-art integrated devices

Combines semiconductor physics and materials analysis

Provides an in depth collection of applied electrical AFM techniques

Inhaltsverzeichnis

Introduction (U. Celano, W. Vandervorst).- Conductive AFM for nanoscale analysis of high-k dielectric metal oxides (C. Rodenbücher, M. Wojtyniak, K. Szot).-Mapping Conductance and Carrier Distribution in Confined Three-Dimensional Transistor Structures (A. Schulze, P. Eyben, K. Paredis, L. Wouters, U. Celano, W. Vandervorst).- Scanning Capacitance Microscopy for two-dimensional carrier profiling of semiconductor devices (J. Mody, J. Nxumalo).- Scanning probe lithography for nanopatterning and fabrication of high-resolution devices (Y. K. Ryu, A. W. Knoll).- Characterizing Ferroelectricity with an Atomic Force Microscopy: an all-around technique (S. Martin, B. Gautier, N. Baboux, A. Gruvermann, A. Carretero-Genevrier, M. Gich, A. Gomez).- Electrical AFM for the analysis of Resistive Switching (S. Brivio, J. Frascaroli, M. H. Lee).- Magnetic force microscopy for magnetic recording and devices (A. Hirohata, M. Samiepour, M. Corbetta).- Nanoscale space charge density profiling with KPFM and photoconductive C-AFM/KPFM (C. Villeneuve-Faure, K. Makasheva, L. Boudou, G. Teyssedre).- Electrical AFM of 2D materials and heterostructures for nanoelectronics (F. Giannazzo, G. Greco, F. Roccaforte, C. Mahata, M. Lanza).- Diamond probes technology (T. Hantschel, T. Conard, J. Kilpatrick, G. Cross).- Scanning Microwave Impedance Microscopy (sMIM) in electronic materials and quantum materials (K. Rubin, Y. Yang, O. Amster, D. Scrymgeour, S. Misra).

Details
Erscheinungsjahr: 2019
Fachbereich: Mechanik & Akustik
Genre: Physik
Rubrik: Naturwissenschaften & Technik
Medium: Buch
Reihe: NanoScience and Technology
Inhalt: xx
408 S.
26 s/w Illustr.
230 farbige Illustr.
408 p. 256 illus.
230 illus. in color.
ISBN-13: 9783030156114
ISBN-10: 3030156117
Sprache: Englisch
Ausstattung / Beilage: HC runder Rücken kaschiert
Einband: Gebunden
Redaktion: Celano, Umberto
Herausgeber: Umberto Celano
Auflage: 1st ed. 2019
Hersteller: Springer International Publishing
Springer International Publishing AG
NanoScience and Technology
Maße: 241 x 160 x 29 mm
Von/Mit: Umberto Celano
Erscheinungsdatum: 24.08.2019
Gewicht: 0,805 kg
Artikel-ID: 115421511
Über den Autor

Umberto Celano is a senior research scientist at imec (Belgium), where his interests encompass solid-state physics and materials science for application in nanoelectronics and emerging devices. In this area, he conducted research at the border between engineering and fundamental science in various institutions such as KU Leuven, Osaka University, and Stanford University. He received his Ph.D. in Physics from the University of Leuven in 2015. Previously, Umberto obtained a B.Eng. in Electronic Engineering and an M.Sc. degree in Nanoelectronics from the University of Rome Sapienza, Italy.

Zusammenfassung

Comprehensive treatment of emerging devices, their operation and characterization

Authors provide a balance of industry and academic expertise

Includes images of state-of-the-art integrated devices

Combines semiconductor physics and materials analysis

Provides an in depth collection of applied electrical AFM techniques

Inhaltsverzeichnis

Introduction (U. Celano, W. Vandervorst).- Conductive AFM for nanoscale analysis of high-k dielectric metal oxides (C. Rodenbücher, M. Wojtyniak, K. Szot).-Mapping Conductance and Carrier Distribution in Confined Three-Dimensional Transistor Structures (A. Schulze, P. Eyben, K. Paredis, L. Wouters, U. Celano, W. Vandervorst).- Scanning Capacitance Microscopy for two-dimensional carrier profiling of semiconductor devices (J. Mody, J. Nxumalo).- Scanning probe lithography for nanopatterning and fabrication of high-resolution devices (Y. K. Ryu, A. W. Knoll).- Characterizing Ferroelectricity with an Atomic Force Microscopy: an all-around technique (S. Martin, B. Gautier, N. Baboux, A. Gruvermann, A. Carretero-Genevrier, M. Gich, A. Gomez).- Electrical AFM for the analysis of Resistive Switching (S. Brivio, J. Frascaroli, M. H. Lee).- Magnetic force microscopy for magnetic recording and devices (A. Hirohata, M. Samiepour, M. Corbetta).- Nanoscale space charge density profiling with KPFM and photoconductive C-AFM/KPFM (C. Villeneuve-Faure, K. Makasheva, L. Boudou, G. Teyssedre).- Electrical AFM of 2D materials and heterostructures for nanoelectronics (F. Giannazzo, G. Greco, F. Roccaforte, C. Mahata, M. Lanza).- Diamond probes technology (T. Hantschel, T. Conard, J. Kilpatrick, G. Cross).- Scanning Microwave Impedance Microscopy (sMIM) in electronic materials and quantum materials (K. Rubin, Y. Yang, O. Amster, D. Scrymgeour, S. Misra).

Details
Erscheinungsjahr: 2019
Fachbereich: Mechanik & Akustik
Genre: Physik
Rubrik: Naturwissenschaften & Technik
Medium: Buch
Reihe: NanoScience and Technology
Inhalt: xx
408 S.
26 s/w Illustr.
230 farbige Illustr.
408 p. 256 illus.
230 illus. in color.
ISBN-13: 9783030156114
ISBN-10: 3030156117
Sprache: Englisch
Ausstattung / Beilage: HC runder Rücken kaschiert
Einband: Gebunden
Redaktion: Celano, Umberto
Herausgeber: Umberto Celano
Auflage: 1st ed. 2019
Hersteller: Springer International Publishing
Springer International Publishing AG
NanoScience and Technology
Maße: 241 x 160 x 29 mm
Von/Mit: Umberto Celano
Erscheinungsdatum: 24.08.2019
Gewicht: 0,805 kg
Artikel-ID: 115421511
Warnhinweis