Piezoresistor Design and Applications

Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology.
Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.

Beth Pruitt is a young and dynamic up and coming professor and the winner of an NSF career award for her recent research work. She s now focusing piezoresistors and has observed that even though they comprise a large share of MEMS product market, there s a dearth of material available on how to design and successfully produce them. The goal of this book is to produce a practical guide to piezoresistor design using specific examples and case studies from Professor Pruitt s recent research efforts.

Joey Doll is a MEMS Development Engineer at SiTime.

Provides comprehensive design guidance on piezoresistance

Includes an overview of applications requirements

Codifies the design of piezoresistors in MEMS

Case study approach includes the design of strain gauges and uniaxial piezoresistors, displacement sensing cantilevers, and pressure sensors

Introduction.- Piezoresistance fundamentals.- Sensitivity, noise and resolution.- Fabrication and process modeling.- Temperature effects.- Design optimization.- Alternative materials and transduction methods.- Appendix A Glossary of mathematical symbols.- Appendix B Ion implantation lookup tables.- Appendix C Code.

Erscheinungsjahr:	2016
Fachbereich:	Nachrichtentechnik
Genre:	Importe , Technik
Rubrik:	Naturwissenschaften & Technik
Medium:	Taschenbuch
Reihe:	Microsystems and Nanosystems
Inhalt:	xi 245 S. 15 s/w Illustr. 86 farbige Illustr. 245 p. 101 illus. 86 illus. in color.
ISBN-13:	9781493955541
ISBN-10:	1493955543
Sprache:	Englisch
Einband:	Kartoniert / Broschiert
Autor:	Doll, Joseph C. Pruitt, Beth L.
Auflage:	Softcover reprint of the original 1st edition 2013
Hersteller:	Springer Microsystems and Nanosystems
Verantwortliche Person für die EU:	Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com
Maße:	235 x 155 x 15 mm
Von/Mit:	Joseph C. Doll (u. a.)
Erscheinungsdatum:	23.08.2016
Gewicht:	0,4 kg