Introduction to Microsystem Design

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Sprache: Englisch

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Beschreibung

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

Über den Autor

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

Zusammenfassung

Provides a thorough revision of the first edition

Covers important topics in the field of micro systems

Written by an expert in the field

Includes supplementary material: [...]

Inhaltsverzeichnis

Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Electrical Measurements.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies of physical domains.- Mechanical devices for electronics.

Details

Erscheinungsjahr:	2016
Fachbereich:	Nachrichtentechnik
Genre:	Mathematik , Medizin , Naturwissenschaften , Technik
Rubrik:	Naturwissenschaften & Technik
Medium:	Taschenbuch
Reihe:	RWTHedition
Inhalt:	xxiv 374 S. 48 s/w Illustr. 332 farbige Illustr. 374 p. 380 illus. 332 illus. in color.
ISBN-13:	9783662507339
ISBN-10:	3662507331
Sprache:	Englisch
Einband:	Kartoniert / Broschiert
Autor:	Schomburg, Werner Karl
Auflage:	Softcover reprint of the original 2nd edition 2015
Hersteller:	Springer RWTHedition
Verantwortliche Person für die EU:	Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com
Maße:	235 x 155 x 22 mm
Von/Mit:	Werner Karl Schomburg
Erscheinungsdatum:	17.10.2016
Gewicht:	0,604 kg