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Serves as a concise but authoritative introduction to the latest innovation in scanning microscopy
Compares ion and electron beams as options for microscopy
Presents a detailed physical model of ion-solid interactions and signal generation
Provides a detailed database of iSE yield behavior as a function of the target ion, element, and energyChapter 1: Introduction to Helium Ion Microscopy.- Chapter 2: Microscopy with Ions - A brief history.- Chapter 3: Operating the Helium Ion Microscope.- Chapter 4: Ion -Solid Interactions and Image Formation.- Chapter 5: Charging and Damage.- Chapter 6: Microanalysis with the HIM.- Chapter 7: Ion Generated Damage.- Chapter 8: Working with other Ion beams.- Chapter 9: Patterning and Nanofabrication.- Conclusion.- Bibliography.- Appendix: iSE Yields, and IONiSE parameters for He+ excitation of Elements and Compounds.- Index.
Erscheinungsjahr: | 2013 |
---|---|
Fachbereich: | Fertigungstechnik |
Genre: | Importe, Technik |
Rubrik: | Naturwissenschaften & Technik |
Medium: | Taschenbuch |
Inhalt: |
viii
64 S. 13 s/w Illustr. 16 farbige Illustr. 64 p. 29 illus. 16 illus. in color. |
ISBN-13: | 9781461486596 |
ISBN-10: | 1461486599 |
Sprache: | Englisch |
Einband: | Kartoniert / Broschiert |
Autor: | Joy, David C. |
Hersteller: |
Springer US
Springer New York |
Verantwortliche Person für die EU: | Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com |
Maße: | 235 x 155 x 5 mm |
Von/Mit: | David C. Joy |
Erscheinungsdatum: | 14.09.2013 |
Gewicht: | 0,138 kg |
Serves as a concise but authoritative introduction to the latest innovation in scanning microscopy
Compares ion and electron beams as options for microscopy
Presents a detailed physical model of ion-solid interactions and signal generation
Provides a detailed database of iSE yield behavior as a function of the target ion, element, and energyChapter 1: Introduction to Helium Ion Microscopy.- Chapter 2: Microscopy with Ions - A brief history.- Chapter 3: Operating the Helium Ion Microscope.- Chapter 4: Ion -Solid Interactions and Image Formation.- Chapter 5: Charging and Damage.- Chapter 6: Microanalysis with the HIM.- Chapter 7: Ion Generated Damage.- Chapter 8: Working with other Ion beams.- Chapter 9: Patterning and Nanofabrication.- Conclusion.- Bibliography.- Appendix: iSE Yields, and IONiSE parameters for He+ excitation of Elements and Compounds.- Index.
Erscheinungsjahr: | 2013 |
---|---|
Fachbereich: | Fertigungstechnik |
Genre: | Importe, Technik |
Rubrik: | Naturwissenschaften & Technik |
Medium: | Taschenbuch |
Inhalt: |
viii
64 S. 13 s/w Illustr. 16 farbige Illustr. 64 p. 29 illus. 16 illus. in color. |
ISBN-13: | 9781461486596 |
ISBN-10: | 1461486599 |
Sprache: | Englisch |
Einband: | Kartoniert / Broschiert |
Autor: | Joy, David C. |
Hersteller: |
Springer US
Springer New York |
Verantwortliche Person für die EU: | Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com |
Maße: | 235 x 155 x 5 mm |
Von/Mit: | David C. Joy |
Erscheinungsdatum: | 14.09.2013 |
Gewicht: | 0,138 kg |