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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Buch von Huiliang Cao
Sprache: Englisch

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Beschreibung
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.

It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.

It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Über den Autor

Hui Liang Cao received the Ph.D. degree in instrument science and technology from Southeast University, Nanjing, China, in 2014. From 2011 to 2012, he studied as a research Ph.D. student in School of Electrical and Computer Engineering in Georgia Institute of Technology, Atlanta, USA. He is one of the top young academic leaders of Higher Learning Institutions of Shanxi and young academic leaders of North University of China. He is currently a postgraduate tutor and associate professor of the School of Instrument and Electronics in North University of China, Taiyuan, Shanxi, China. His research interests include the areas of MEMS inertial devices, and he has published more than 30 papers in journals and conference proceedings as the first author. He is an IEEE member and a fellow of micro nano technology association of China and automation association of China.

Zusammenfassung

Records the dual-mass linear vibration silicon-based MEMS gyroscope in detail

Identifies "Post-Demographic Golden Age"

Gives detailed descriptions of each research technology and optimization method

Inhaltsverzeichnis
Chapter 1 Introduction.- Chapter 2 Silicon-based MEMS gyroscope structure and working principle.- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model.- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization.- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology.- Chapter 6 Temperature influence on MEMS gyroscope and suppression method.- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology.- References.
Details
Erscheinungsjahr: 2023
Fachbereich: Raumfahrttechnik
Genre: Importe, Technik
Rubrik: Naturwissenschaften & Technik
Medium: Buch
Inhalt: x
224 S.
63 s/w Illustr.
137 farbige Illustr.
224 p. 200 illus.
137 illus. in color.
ISBN-13: 9789811992469
ISBN-10: 9811992460
Sprache: Englisch
Einband: Gebunden
Autor: Cao, Huiliang
Hersteller: Springer Singapore
Springer Nature Singapore
Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com
Maße: 241 x 160 x 19 mm
Von/Mit: Huiliang Cao
Erscheinungsdatum: 18.04.2023
Gewicht: 0,524 kg
Artikel-ID: 125874111
Über den Autor

Hui Liang Cao received the Ph.D. degree in instrument science and technology from Southeast University, Nanjing, China, in 2014. From 2011 to 2012, he studied as a research Ph.D. student in School of Electrical and Computer Engineering in Georgia Institute of Technology, Atlanta, USA. He is one of the top young academic leaders of Higher Learning Institutions of Shanxi and young academic leaders of North University of China. He is currently a postgraduate tutor and associate professor of the School of Instrument and Electronics in North University of China, Taiyuan, Shanxi, China. His research interests include the areas of MEMS inertial devices, and he has published more than 30 papers in journals and conference proceedings as the first author. He is an IEEE member and a fellow of micro nano technology association of China and automation association of China.

Zusammenfassung

Records the dual-mass linear vibration silicon-based MEMS gyroscope in detail

Identifies "Post-Demographic Golden Age"

Gives detailed descriptions of each research technology and optimization method

Inhaltsverzeichnis
Chapter 1 Introduction.- Chapter 2 Silicon-based MEMS gyroscope structure and working principle.- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model.- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization.- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology.- Chapter 6 Temperature influence on MEMS gyroscope and suppression method.- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology.- References.
Details
Erscheinungsjahr: 2023
Fachbereich: Raumfahrttechnik
Genre: Importe, Technik
Rubrik: Naturwissenschaften & Technik
Medium: Buch
Inhalt: x
224 S.
63 s/w Illustr.
137 farbige Illustr.
224 p. 200 illus.
137 illus. in color.
ISBN-13: 9789811992469
ISBN-10: 9811992460
Sprache: Englisch
Einband: Gebunden
Autor: Cao, Huiliang
Hersteller: Springer Singapore
Springer Nature Singapore
Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com
Maße: 241 x 160 x 19 mm
Von/Mit: Huiliang Cao
Erscheinungsdatum: 18.04.2023
Gewicht: 0,524 kg
Artikel-ID: 125874111
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